365竞彩

分子泵性能测试的工程误差探析
阅读次数:1177 发布时间:2017/5/10 14:57:24
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分子泵性能测试的工程误差探析

 

  ZHENDUIDANGQIANPUBIANCAIYONGDEFENZIBENGCHOUQIXINGNENGCESHIFANGFAYUCHENGXU,TAOLUNYONGSHENGYAFACELIANGWOLUNFENZIBENGYASUOBISHISHICEJISUANZHIYUZHENSHIZHIZHIJIANKEGUANCUNZAIDECHAYI,BINGTAOLUNYONGQICELIANGFUHEFENZIBENGYASUOBIDEKEXINGXING;FENXIYONGDIGUANLIULIANGJIFACELIANGFENZIBENG(WOLUNFENZIBENGHEFUHEFENZIBENG)CHOUSUSHIKENENGCHANSHENGDEZHIJIEHUOJIANJIEDEWUCHA,BINGTICHUXIAOCHUCILEIWUCHADEJIBENSILU,JIYUCISILU,ZAISHIJIGONGCHENGZHONGKEDEDAOKEXUEKEKAODEGENGNENGKEGUANFANYINGCHANPINXINGNENGDECESHISHUJU。

  分子泵能耗低,使用方便,易维护,其在分子流区域( 涡轮分子泵) 和接近分子流区域( 复合分子泵)有稳定的抽气性能,广泛应用于高能加速器、重粒子加速器、可控热核反应装置、等离子体物理空间研究、原子束分子束系统、表面物理和分析仪器、高级电子元器件制造、半导体和光学元器件制造、真空镀膜、真空冶炼等涉及真空技术的电子、冶金、化工、科研等众多领域。

  FENZIBENGZHUYAOCHOUQIXINGNENGZHIBIAOBAOKUO*GONGZUOYALI、YASUOBIYUCHOUSU。GENJUDANGQIANPUBIANCAIYONGDEFENZIBENGXINGNENGCESHIFANGFAYUCHENGXU,*GONGZUOYALICAIYONGZHIJIEFACELIANG,YASUOBICAIYONGSHENGYAFACELIANG,CHOUSUCAIYONGLIULIANGFAHUOBIAOZHUNLIUDAOFACELIANG,ERZHEISANXIANGZHIBIAODECELIANG,CONGLILUNSHANGFENXISHIKEXINGDE,DANZAISHIJIGONGCHENGCELIANGZHONG,GENJUSHIJICELIANGTIAOJIAN,DUIYUWOLUNFENZIBENG,YASUOBIDECELIANGZHIYUZHENSHIZHIZHIJIANCUNZAIJIAODADECHAYI; ERWULUNSHIWOLUNFENZIBENGHUOFUHEFENZIBENG,JIYUDIGUANLIULIANGJIFADECHOUSUDECELIANGZHIYUZHENSHIZHIZHIJIANYECUNZAIZHIJIEHUOJIANJIEDEWUCHA,BENWENJIANGZHUYIJINXINGFENXITAOLUN。

1、压缩比测量

365竞彩  YASUOBICELIANGCAIYONGSHENGYAFA,TONGGUOXIANGBEICEBENGDEQIANJIZHENKONGCECHONGRUBEICEQITIYIGAIBIANQIANJIYALIYURUKOUYALI,YASUOBIYOULIANGZHEBIANHUALIANGZHIBIZHIHENGLIANG,CELIANGGUOCHENGZHONGXUXIANJIANLI*GONGZUOYALI。

365竞彩  SHE*GONGZUOYALIWEIp01,DUIYINGQIANJIYALIWEIp02( CICHUp01、p02JIWEIBENDIZHI) ,DIi(i=1,2,3,4.....) CICHONGQIHOU,RUKOUYALIBIANWEIp i1,BIANHUALIANGWEIΔpi 1,QIANJIYALIBIANWEIpi 2,BIANHUALIANGWEIΔp i2,DUIYINGDEYASUOBIWEIKi,ZEYOU

 

  *YASUOBIK max= max(K 1,K 2,,,,Ki ) 。

365竞彩  《GB/T 7774-2007 ZHENKONGJISHUWOLUNFENZIBENGXINGNENGCANSHUDECELIANG》ZHONGGUANYUYASUOBIDECESHIGUICHENGWEIDUIQIANJIYALIDECHONGQILIANGZUOXIANGSHU,DANGENJULILUNYANJIUHESHIJIANZHENGMING,WEILEXIAOCHUBENDIZHIDUICELIANGDEYINGXIANG,TONGGUO*CIDUIQIANJIZHENKONGCECHONGQIHOU,YINGBAOZHENGDUIYINGDERUKOUYALI

  p11= 2 p01 ( 2)

  YEJIΔp 11=p01 ( 3)

  而对第二次( 含) 以后的充气量则不作严格规定。实际工程产品中,考虑到实际应用意义,加之由于条件所限,一般不对泵作极限压力( 无限制拖动和烘烤后,测试罩中*终趋近的压力值; 相比*工作压力而言,此值在工程应用中意义不大) 检测,而对*工作压力的检测有严格的规程和限制条件,其值是一个条件限制值而非趋近值,目前市场上的分子泵*工作压力一般为10-6~ 10-7 Pa 量级。

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